The property control of high purity titanium dioxide for the perovskite of electronic materials was examined by a vapor phase oxidation process. In the production process of the titanium dioxide by the CVD method, the powder of titanium dioxide is synthesized by the reaction of the titanium tetrachloride with oxygen at high temperature. Conditions to control the powder properties in this process were investigated using pilot-scale apparatus. Consequently, 100% rutile crystalline powder could be synthesized by addition of steam to promote rutile formation. Also, 100% anatase could be produced of a low reaction temperature. Uniform particles in size, shape and crystalline structure were produced by the reaction of turbulent diffusion combustion and the particle size could be controlled from 0.20 mu m to 0.52 mu m by varying the diffusion rate. On the basis of these fundamental experiments, it became possible to continuously produce high purity titanium dioxide single crystalline powder with uniform particle size.