화학공학소재연구정보센터
Langmuir, Vol.10, No.11, 4089-4094, 1994
Adsorption of Nanometer-Sized Palladium Particles on Si(100) Surfaces
It is shown that polymer-stabilized Pd particles, adsorbed on Si, initiate the growth of electroless Ni. The influence of the polymer (poly(vinylpyrrolidone)) on the particle size and on the surface coverage is described. While Pd particles adsorb strongly on Si, almost no adsorption is observed on SiO2. Implications of this adsorption selectivity for the production of high-resolution metal patterns on Si are briefly discussed.