Previous Article Next Article Table of Contents Langmuir, Vol.12, No.8, 2121-2124, 1996 DOI10.1021/la950811u Export Citation Projection Photolithography Utilizing a Schwarzschild Microscope and Self-Assembled Alkanethiol Monolayers as Simple Photoresists Behm JM, Lykke KR, Pellin MJ, Hemminger JC Please enable JavaScript to view the comments powered by Disqus.