The plasma polymerization of a variety of substituted perfluorocyclohexane monomers (perfluorocyclohexane, perfluoromethylcyclohexane, perfluoro-1,2-dimethylcyclohexane, perfluoro-1,3-dimethylcyclohexane, and perfluoro-1,3,5-trimethycyclohexane) is systematically compared under identical experimental conditions. The relative abundance of the various CFn (n = 0-3) functionalities found in the respective plasma polymers is shown to be strongly influenced by the electrical discharge power and the structural nature of the fluorocarbon precursor.