Macromolecules, Vol.30, No.7, 2194-2196, 1997
Formation of Polymerizable Monomer Langmuir-Blodgett-Films with Polyfluorocarbon Chains for Use in High-Resolution Negative Resists
Keywords:N-OCTADECYLACRYLAMIDE;MOLECULAR RESISTS;MULTILAYERS;MONOLAYERS;MICROLITHOGRAPHY;AMPHIPHILES;HYDROCARBON;LAYERS