The polymeric fluorine-bridged phthalocyanines (GaPcF)(n) and (AlPcF)(n), and their 1:1 copolymer were investigated by temperature dependent mass spectrometry to prove their thermal stability and their sublimation behavior. It is shown that all three materials can be sublimed reproducibly. This requires the removal of excess monomeric and dimeric species, which are present after the chemical synthesis of the polymers.