화학공학소재연구정보센터
Molecular Crystals and Liquid Crystals Science and Technology. Section A. Molecular Crystals and Liquid Crystals, Vol.294, 91-94, 1997
Developing High-Resolution Electrical Probing System Based on Atomic-Force Microscopy
We have developed an electrical probing system based on a conducting atomic force microscope (AFM), which has great versatility and accuracy in acquiring nanometer-scale spatially resolved electrical information of samples, involving local I(current)-V(voltage) and I-s(distance) characteristics, simultaneous current and topography mapping, etc. together with the conventional AFM function. It is particularly powerful in evaluation of the electrical properties of nanosized materials and devices.