화학공학소재연구정보센터
Nature, Vol.381, No.6578, 140-141, 1996
Low-Threshold Cold Cathodes Made of Nitrogen-Doped Chemical-Vapor-Deposited Diamond
BECAUSE diamond surfaces terminated with hydrogen have a negative electron affinity(1-4) (the conduction band minimum lies below the vacuum level), they are expected to emit electrons spontaneously, This has led to attempts to develop ’cold cathodes’-miniaturized vacuum diodes that might have applications in microelectronics and flat-panel displays, In previous studies of electron emission from diamond grown by chemical vapour deposition(5-9) (CVD), the threshold voltages for emission were more than an order of magnitude too large for use in battery-driven cold cathodes, Although low-threshold emission from caesium-coated, nitrogen-doped high-pressure synthetic diamond was reported recently(10), ultimately diamond thin films grown by chemical vapour deposition (CVD) look to be the most promising material for cold-cathode applications, But to obtain low-threshold emission, it is necessary to introduce high concentrations of donor dopants such as nitrogen-something that is difficult for CVD diamond, Here we report that high concentrations of nitrogen can be incorporated into diamond films by using urea as the gaseous nitrogen source, and that such heavily doped films shown very-low-threshold electron emission, which augurs well for cold-cathode technology.