화학공학소재연구정보센터
Plasma Chemistry and Plasma Processing, Vol.17, No.3, 305-314, 1997
The Study of Electron-Energy Distribution-Functions, Swarm Parameters, and Transition Rates in N-2+o-2 Plasma
Using the Boltzman equation electron energy distribution functions, swarm parameters (mean energy, characteristic energy, drift velocity and diffusion coefficient), and transition rates (one for vibrational and one for electronical excitation for each of the gases) for N-2+O-2 (80%+20%) mixture plasma have been calculated. The influence of the applied reduced electric field and the vibrational temperatures on these quantities is studied.