Surface photovoltage spectroscopy (SPS) has been used for quality control of ZnO/CdS/Cu(In,Ga)Se-2 (CIGS) thin-film solar cells. The results show that SPS makes it possible to detect "hard failures" following CIGS deposition, and both "hard" and "soft" failures following CdS deposition and following ZnO deposition. In addition, semi-quantitative screening of CdS/CIGS and ZnO/CdS/CIGS samples is possible. Hence, SPS is suggested as a useful tool for in-line monitoring of CIGS-based solar cell production lines. Moreover, SPS is shown to yield important new information regarding CIGS-based solar cells: (a) A deep gap state is found in samples of superior performance. (b) As opposed to the CdS/CIGS structure, a marked decrease in the open-circuit voltage upon Na contamination in ZnO/CIGS structures is found.