Yttria-stabilized zirconia thin films deposited by radio-frequency sputtering from a 3 mol% Y2O3/ZrO2 target show primarily tetragonal orientation. Annealing in air further reduces the fraction of monoclinic phase and enhances the crystallinity of the tetragonal phase. Films annealed at 700 degrees C for 2 h showed a phase composition which was greater than 95% tetragonal.