Solid State Ionics, Vol.99, No.1-2, 95-102, 1997
Thermodynamic Analysis of Na-Beta"-and Na-Beta-Al2O3 Deposition from Halide Vapors
The CVD growth of Na-beta "(beta)-Al2O3 has been simulated using fluoride and chloride precursors. simulation was conducted in dry and wet oxidising atmospheres in the temperature range from 1100 to 1600 K. Conditions of beta "(beta)-Al2O3 formation are predicted and optimised.