Solid State Ionics, Vol.101-103, 71-78, 1997
Enhanced densification of indium-tin oxide ceramics for sputter target through wet mechanochemical processing
Changes in the sinterability of indium-tin oxide (ITO) due to mechanical stressing of In2O3 95/SnO2 5 mixture have been studied. Starting composite powders were prepared by in situ sol preparation method using an agitation beads mill. The enhanced sinterability due to mechanical treatment is explained by the dissolution-reprecipitation to form a layer of hydrogels, resulting in the decrease in the vaporization rate of SnO2 above 1200 degrees C.
Keywords:ITO CERAMICS;FILMS