Solid State Ionics, Vol.101-103, 165-170, 1997
Synthesis of ScF3, LaF3 nanolayers and nLaF(3)-mScF(3) multinanolayers at the surface of silicon by successive ionic layer deposition method
The layer-by-layer synthesis of LaF3, ScF3 nanolayers was perfomed by SnD method. The growth kinetics of mentioned nanolayers was investigated by the ellipsometry method, their composition was explored by FTIR and XP spectroscopy, and the structure was stated by the electron diffraction method. The synthesis of the multilayers mScF(3)-nLaF(3), where m and n are the numbers of SILD cycles, was performed in the determined optimal conditions.