Deuterium ions of 100 keV were implanted into proton conductive perovskite oxides, such as SrCeO3 (5% Yb), BaCeO3 (10% Y), SrZrO3 (10% Yb) and CaZrO3 (10% In) with the thickness of 0.15-0.5 mm to a dose of similar to 10(18)/cm(2) at room temperature. The depth profiles of D were analyzed using the He-3(D, He-4)p nuclear reaction. The depth profile of D retained at the front (irradiated) surface shows a broad peak. For Y or Yb doped SrCeO3, BaCeO3 and SrZrO3, the D depth profiles show tails into the sample, and a small but non negligible amount of D was detected at the back surface. These results indicate anomalous penetration of D through these samples.