The paper is principally concerned with strategic investigations based on the development of planar supported thin film electrolyte (STEF) configurations for intermediate temperature SOFC applications. A novel and cost effective electrostatic assisted vapour deposition process has been used to deposit dense YSZ film onto the porous anode substrates. Several approaches were investigated to deposit a dense and crack-free YSZ film onto the porous anode substrate during the fabrication of PEN structure. The use of an amorphous YSZ thin film followed by a crystalline YSZ film deposition using the continuous EAVD process seem to be able to produce a dense and crack-free YSZ film onto the porous NiO-YSZ substrate with a well defined interface. Individual dense/porous films and PEN assembly were characterised using XRD, SEM, and I-V test techniques for structural examination and electrical measurements.