The concentration change of D and H retained in SrCe0.95Yb0.05O3-delta by 5 keV D-2(-) and H-2(+) irradiation and subsequent thermal annealing has been studied by means of the elastic recoil detection (ERD) and Rutherford backscattering (RBS) techniques. It has been found that the saturation concentration of D implants is D/SrCe0.95Yb0.05O3-delta = 1.1. Decay curves of D concentration on isothermal annealing show that the retained numbers of D decrease rapidly and hereafter gradually, and finally reach a constant level at each temperature. The decay curves have been analyzed using the mass balance equations for free and trapped species of D, which include the rate constants of the thermal detrapping, retrapping and local molecular recombination between free species leading to the release of D. The analysis indicates that the activation energy for thermal detrapping is 0.56 eV and that for effective molecular recombination is 1.7 eV. These data are compared with some data obtained from the other measurement.