Superlattices of perovskite-type proton conductors, SrCeO3, SrZrO3 and SrTiO3 were synthesized by pulsed laser ablation method to study the effect of lattice distortion on proton dynamics. The SrCeO3, SrZrO3 thin films and their superlattices are grown in the [100] azimuth when they are fabricated on MgO(100) substrate and in the [211] azimuth when they are fabricated on SrTiO3(100) substrate or MgO(100) substrate with buffer layer of SrTiO3. XRD and Raman results suggest that the lattice distortion depends on the thickness ratio of the superlattice.