This paper reviews different thin-film deposition methods for oxides, especially for stabilized zirconia and compares them with regard to SOFC applications. These methods will be classified into chemical, physical methods and ceramic powder processes. Each method is described with its special technical features and examples of components for fuel cells are given. PVD and CVD methods are specially suited to depositing high-quality films of simple chemical compositions. Liquid droplet methods and ceramic powder processes are more qualified for the deposition of complicated chemical compositions.