Native defects and impurity diffusion in various CdS materials were studied by combined techniques involving cathodoluminescence (CL) and electron probe microanalysis (EPMA). CL spectra, colour CL micrographs and EPMA modes were applied to map the defect diffusion and distribution after low energy electron bombardment (LEEB). Different contrast modifications were induced by LEEB. Particle ejection and defect diffusion have been accounted for in explaining the observed phenomena.