화학공학소재연구정보센터
Thin Solid Films, Vol.239, No.2, 272-275, 1994
On the Vanderpauw Method of Resistivity Measurements
The Van der Pauw method is one of the most effective and widely used methods of the four-probe mode of determining the resistivity of materials in the form of thin films. The right version of the suggested equations for the correction function that fit the given graph was confirmed by numerical calculations. Then, the equation was experimentally verified by designing samples of different shapes and contact configurations. For easy, fast and accurate estimation of the correction factor, tables of the numerical values are given with steps of 0.1 and 1.0 for the range of R’/R" ratio from 1 to 200. It is recommended that these tables be used rather than an inaccurate estimation from the graph or recalculation of the factor.