화학공학소재연구정보센터
Thin Solid Films, Vol.241, No.1-2, 88-91, 1994
Raman Analysis of the Modifications Induced by Laser Processing and Hydrogen Implantation in Carbon-Films Deposited by the Ablation Technique
In this work, diamond-like carbon films prepared by laser ablation from graphite targets were submitted to pulsed excimer laser treatments before and after hydrogenation performed by molecular implantation. The structural properties of the irradiated layers were investigated by Raman spectroscopy. Both the hydrogen-free and hydrogenated diamond-like carbon films are shown to be transformed into polycrystalline graphite after laser treatment.