Ultraviolet/ozone (UVO) treatment is investigated as a processing step in the fabrication of metal oxide thin films from Langmuir-Blodgett (LB) precursor films. UVO processing was found to reduce LB films to metal carbonates at a rate of approximately 1 min per layer. Subsequent thermal treatment resulted in dense, uniform metal oxide thin films. The structure and composition of these films are studied using ellipsometry, X-ray diffraction, and Rutherford backscattering spectrometry.