Europium monoxide (EuO) simple films (ESFs) and EuO/Cu multilayered films (EMFs) have been prepared successfully by a molecular beam epitaxy method using an oxygen atmosphere. The structural and magnetic properties depend highly on the source material (metal Eu or Eu2O3) and the oxygen atmospheric pressure. Nearly epitaxial growth was observed for ESF. Metal-insulator transitions were observed for some ESFs. Though epitaxial growth was not achieved, the formation of superstructures in some EMFs was confirmed by low-angle X-ray diffraction peaks. The magnetization measurements for EMFs indicate approximately the same saturation magnetization M(s) and Curie temperature T(c) as the bulk values, even for an EMF with EuO layers as thin as 2.5 nm.