화학공학소재연구정보센터
Thin Solid Films, Vol.254, No.1-2, 3-6, 1995
Diamond Growth on Porous Silicon by Hot-Filament Chemical-Vapor-Deposition
Diamond films have been grown on porous silicon by hot filament chemical vapor deposition. The films are characterized by scanning electron microscopy, Raman spectroscopy and X-ray diffraction analysis, showing that continuous diamond films with crystallinity are obtained on porous silicon. The demonstration of diamond growth on porous silicon seems to suggest that the nanoscale microstructures of porous silicon play an important role in nucleation and growth of diamond.