화학공학소재연구정보센터
Thin Solid Films, Vol.255, No.1-2, 321-324, 1995
P-Wells Made of Porous Silicon for Power Devices - Determination of the Formation Steps
Porous silicon is formed in N- substrates. The porous layers are about 150 mu m thick. A method to localize these porous areas is defined. These technological results should allow the achievement of diffused wells made of porous silicon. Such wells are thought to considerably improve the performances of symmetrical sustaining voltage power devices.