Monoclinic lead-phthalocyanine crystal film having only (320) orientation and monoclinic crystal film composed of lower (200)- and upper (320)-rich orientation were obtained at a substrate temperature of 293 K, and deposition rates higher than 1.0 nm s(-1) and from 0.8 to 0.2 nm s(-1), respectively. A film consisting of mixed triclinic and monoclinic crystals in which the distribution was almost homogeneous was obtained at a substrate temperature of 293 K and a deposition rate of 0.1 nm s(-1), and a pure triclinic crystal film was obtained at a substrate temperature of 373 K.