화학공학소재연구정보센터
Thin Solid Films, Vol.258, No.1-2, 21-25, 1995
Growth of Boron-Nitride Thin-Films by Metal-Organic Chemical-Vapor-Deposition
Boron nitride films were grown for the first time by metal-organic chemical vapour deposition from trimethyl borazine as a single-source organometallic precursor containing boron and nitrogen. Films were deposited at various substrate temperatures using ammonia as a carrier gas and were characterized by IR spectroscopy, X-ray diffraction and scanning electron microscopy; these reveal the presence of crystallites of boron nitride with an sp(2)- and sp(3)-bonded structure.