The process of vapor deposition polymerization (VDP) of N-methylolacrylamide (NMAA) was real-time in-situ observed with infrared reflection absorption spectroscopy. The red-heated filament was used for production of the initiator for polymerization. The sticking coefficient and the polymer yield were calculated on the basis of plots of absorbance of C=O and C=C stretching peaks against time during and after the deposition. The sticking coefficient of NMAA molecules on the substrate maintained at 265 K was 0.53 in the case of physical vapor deposition without existence of the red-heated filament. This value reached 0.98 on heating the filament up to 2300 K. The polymer yield in the steady slate of VDP was 44%, of which 26% and 18% were caused by the polymerization at the same time as deposition and the post-polymerization, respectively.