Thin films of rare earth oxides (REOs) have been deposited on stainless steel and quartz substrates by the metallo-organic chemical vapour deposition technique, using beta-diketonate precursors. The structure and characteristics of the REO films were determined by scanning electron microscopy, X-ray diffraction, Auger electron spectroscopy, Secondary ion mass spectroscopy and X-ray photoelectron spectroscopy. The thicknesses of the coatings were determined by highly accurate weighing and by profilometry after a laser impact. Coated steel samples were oxidized at high temperature in isothermal and cyclic conditions to study the deposited rare earth element effect.