Thin Solid Films, Vol.263, No.1, 37-41, 1995
Sb-Doped SnO2 Transparent Conducting Oxide from the Sol-Gel Dip-Coating Technique
The electrical properties of Sb-doped SnO2 films prepared by the sol-gel dip-coating method have been investigated. The X-ray photoelectron spectroscopy (XPS) technique was utilized to determine the actual Sb content in the layers. This content was found to be lower than that expected from the starting solution composition value. The behaviour of the resistivity of the films as a function of this actual doping appeared quite different from that observed by other authors using other deposition methods. As the Sb content in SnO2 increases, the evolution in the distribution of the Sb5+ and Sb3+ components in the XPS spectra has been analyzed. The results are discussed in relation to the conductivity and the coloration of the films.