화학공학소재연구정보센터
Thin Solid Films, Vol.264, No.2, 172-175, 1995
1 MHz Quartz Length Extension Resonator as a Probe for Scanning Near-Field Acoustic Microscopy
The feasibility of a rod-shaped I MHz length extension quartz resonator as a probe for scanning near-field acoustic microscopy was investigated. A corner of the quartz rod which is exposed at an angle of 45 degrees to the surface of the sample is used as a probing tip. The damping of the vibration increases with the approach of the tip to the sample and is used as a signal to obtain a topographic image of the sample at sub-micron resolution.