Cu-surface protection with self-assembly formed oxime monolayers is reported. Long alkyl chain oximes, dodecyl, hexadecyl, octadecyl, were synthesized. Chemisorption conditions were established. Monolayer films were examined by ellipsometry, contact angle measurements, and thermal stability. The area occupied by octadecyl oxime determined by a Lauda film balance was 0.27 nm(2). Electronic testers (Cu/Cr lines evaporated onto a ceramic substrate) were modified with three oximes and subjected to the accelerated aging. The best corrosion protection was shown by Cu conductors modified with an octadecyl oxime monolayer, while the slowest dendritic growth was observed for conductor lines modified with dodecyl oxime monolayer.