화학공학소재연구정보센터
Thin Solid Films, Vol.266, No.2, 94-95, 1995
Angular Selectivity of the Infrared Transmittance Through Obliquely Sputter-Deposited Ti-Oxide-Based Films
Titanium-oxide-based films were produced by reactive sputtering onto glass substrates oriented with a large angle between the surface normal and the direction of the incoming deposition species. The optical properties were angular selective with a higher transmittance for light incident from the same side of the normal (positive angles) as the deposition material than for light coming from negative angles. The selectivity was largest in the near-infrared wavelength range.