N-vinylcarbazole (NVCz) was evaporated toward a substrate of a glass slide coated with silver 100 nm thick with the existence of a red-heated filament. The processes of vapor deposition polymerization (VDP) and annealing were observed with in-situ infrared reflection absorption spectroscopy. The filament temperature of 2300 K and the substrate temperature of 266 K were effective to retard the re-evaporation of deposited NVCz. After NVCz was deposited on the above conditions and then annealed at 285 K, the resulting VDP film had a number average molecular weight of 1.1 X 10(4) and a polymer yield of 88%.