화학공학소재연구정보센터
Thin Solid Films, Vol.272, No.1, 148-156, 1996
Performances Presented by Large-Area Thin-Film Position-Sensitive Detectors Based on Amorphous-Silicon
This paper presents a low-cost technology for the realisation of large-area thin film position-sensitive detectors using the a-Si:H technology. The obtained results are quite promising regarding the application of these sensors to a wide variety of optical inspection systems, such as : machine tool alignment and control; angle measuring; rotation monitoring; surface profiling; medical instrumentation; targeting; remote optical alignment; guidance systems; etc., to which automated inspection control is needed.