We have developed a new analytical method, the glancing-incidence and glancing-takeoff X-ray fluorescence (GIT-XRF) method. By using this method, X-ray fluorescence can be measured al various incident and takeoff angles, and the experimental results are compared with the calculated curves. As a result, we tan obtain information such as the thickness and density of thin films. Compared with the total reflection X-ray fluorescence method, the advantages of the GIT-XRF method are that it allows a surface-sensitive analysis and a detailed thin-film analysis. In this paper, we will show how the CIT-XRF method is useful for thin-film analysis of Mn-Au double layers.