Thin Solid Films, Vol.275, No.1-2, 184-187, 1996
Monte-Carlo Simulation of Non-Specular X-Ray-Scattering Profiles from Multilayered Structures
A simple model for calculating non-specular X-ray scattering profiles from non-ideal multilayers is proposed. A Monte Carlo method is used to simulate a "imperfect" multilayer structure. Non-specular profiles are calculated using the kinematical theory of scattering. The influence of uncorrelated, laterally correlated, and vertically correlated interface roughness on omega-scans is studied.