This paper describes the preparation of aluminium-doped zinc oxide films by thermal evaporation of zinc acetate (Zn(CH3COO)(2) . 2H(2)O) and aluminium chloride (AlCl3) onto a heated glass substrate. The structural, optical and electrical properties of the deposited films were investigated. Highly transparent films with a conductivity as high as 2.3 x 10(2) Omega(-1) cm(-1) can be produced by controlling the deposition parameters. The electron carrier densities are in the range (0.2-7) x 10(19) cm(-3) with mobilities of 22-58 cm(2) V-1 s(-1).