화학공학소재연구정보센터
Thin Solid Films, Vol.281-282, 94-97, 1996
Thin-Film Silicon Compound Growth Mechanisms - CrSi2/Si(001)
CrSi2 is grown on Si(001) substrate with solid-phase reaction. Samples are prepared by one-step annealing and their structure is analyzed with transmission electron microscopy. A new epitaxial growth relation is found, that is, CrSi2(001)//Si(001) with CrSi2(110)//Si(110).