화학공학소재연구정보센터
Thin Solid Films, Vol.281-282, 190-193, 1996
A Theory on Planar Magnetron Discharge
A new theory on planar magnetron discharge is developed by taking into account relevant parameters : the kinetic energy of electrons, the potential distribution, the magnetic flux density distribution, the collision frequency and the ionization probability. The discharge current is expressed as a function of the average electric held strength and the magnetic flux density, Experimental results show good agreement with the theory.