화학공학소재연구정보센터
Thin Solid Films, Vol.281-282, 517-520, 1996
Comparison Between Bi-Superconductor Thin-Films Fabricated via Codeposition and Layer-by-Layer Deposition by Ion-Beam Sputtering Method
Bi2Sr2CanCun+1Oy (n greater than or equal to 0; BSCCO) thin film is fabricated via two different processes using an ion beam sputtering method i.e. codeposition and layer-by-layer deposition. A single phase of Bi2212 can be fabricated via the co-deposition process, while it cannot be obtained by the layer-by-layer process. Ultra-low growth rate in our ion beam sputtering system brings out the difference in Bi element adsorption between the two processes and results in only 30% adsorption against total incident Bi amount by layer-by-layer deposition, in contrast to enough Bi adsorption by co-deposition.