화학공학소재연구정보센터
Thin Solid Films, Vol.286, No.1-2, 274-276, 1996
Recent Developments in RF-Sputtered Cadmium Stannate Films
A method for producing single-phase cadmium stannate thin films is reported. Polycrystalline films were prepared by RF sputtering onto water-cooled Corning glass substrates, followed by a high temperature anneal. Resistivities as low as 1.28 x 10(-4) ohm . cm have been achieved, lower than any previously published results for this material. Even with sheer resistivities as low as 7.5 ohm sq(-1), exceptionally high film transparency (similar to 85%) is maintained, with very low absorption in the visible spectrum.