화학공학소재연구정보센터
Thin Solid Films, Vol.286, No.1-2, 282-288, 1996
Surface and Buried-Interfacial Reactivity of Iron and MoS2 - A Study of Laser-Deposited Materials
Chemical reactions occurring at laser-deposited MoS2/Fe buried-interfaces were studied and compared with those observed previously from Fe/MoS2 single crystals and Fe/sputter-deposited MoS2 thin films, Laser-deposited MoS2 films were prepared using either a frequency doubled (lambda = 532 nm) Nd:YAG laser or a KrF (lambda = 248 nm) Eximer laser; Results show that substantial reaction occurs at Eximer MoS,I iron interfaces to form iron sulfides and several Fe-MoS2 compounds. However, only a limited reaction is observed fur the YAG MoS2/Fe specimen. This difference has been attributed to the highly energetic nature of the species in the Eximer laser plume. it is also round that iron tends to diffuse into the MoS2, layers upon annealing, in agreement with previous work over single-crystal MoS2 and sputtered thin films (J,S. Zabinski and B.J. Tatarchuk, Surf : SL Sci., 241 (1991) 157; J.S. Zabinski et al., Surf Sci,, 241 (1991) 171). Annealing to a higher temperature eventually reduces iron sulfides and Fe-MoS2 compounds back to metallic iron and presumably MoS2.