화학공학소재연구정보센터
Thin Solid Films, Vol.287, No.1-2, 202-207, 1996
Arc Evaporated Ti-N Films with Reduced Macroparticle Contamination
Through effective magnetic are steering and optimization of the modes of reactive deposition and ion assistance, Ti-N films with reduced droplet contamination were produced. Are steering was accomplished by two small-sized rotating electromagnets with low power consumption (< 100 W). The maximum size and the number density of the droplets greater than 1 mu m on the surface of the deposited Ti-N films did not exceed 4 mu m and 4000 mm(-2), respectively. These characteristics make the Ti-N coatings obtained in the present contribution superior to Ti-N films produced by are deposition methods currently used for industrial applications, Moreover, the Ti-N films investigated are characterized with dense structure, smooth surface, good adhesion, high microhardness and corrosion resistance. These Ti-N films could find successful application as wear- and corrosion-resistant coatings on cutting and forming tools.