Thin Solid Films, Vol.287, No.1-2, 288-292, 1996
Electromagnetic-Field Resonance in Thin Amorphous Films - A Tool for Nondestructive Localization of Thin Marker Layers by Use of a Standard X-Ray Tube
A technique for the determination of the total film thickness and the position of a marker layer in an amorphous graphite film by means of grazing incidence X-ray reflectometry and X-ray fluorescence is presented. This technique makes use of a strong resonance effect in the electric field intensity distribution measured in the graphite film, Angularly dependent fluorescence measurements on samples with different positions of a Ti marker showed that independent, non-destructive determination of the total graphite thickness and of the Ti position can be achieved with a relative accuracy of the order of 1%. The presented measurements were performed using a standard laboratory X-ray source and equipment.