The film formation mechanism during the alternating vapor deposition polymerization was studied by monitoring the change in the amount of adsorbate during the deposition. Azelaoyl dichloride (ADC) monomers can be chemisorbed onto the diaminoheptane (DAH) layer and form a mono-molecular layer with a normal molecular orientation. DAH monomers can be chemisorbed onto the ADC layer and form a multimolecular layer on the surface of the chemisorbed DAH layer with the normal molecular orientation. Polyamide thin film with a layered structure like an Langmuir-Blodgett film was obtained by use of the alternating vapor deposition polymerization method, similar to the atomic layer epitaxy method.