Surfaces of CdTe thin films were studied by atomic force microscopy (AFM). Samples were prepared-using Coming glass as a substrate-by a modification of the close spaced vapour transport (CSVT) technique with 400 degrees C as the substrate temperature. Roughness measurements of the surface of the microcrystals that are present in the films show a flatness better than in the case of CdTe layers grown by MBE on a CdTe substrate. Nearly atomically flat terraces with sizes up to 0.2 mu m(2) were found.