A novel piezoelectric thin film of Pb(Ni1/3Nb2/3)(0.2)Zr0.4Ti0.4O3 (PNNZT, 2/4/4) has been successfully deposited on Pt/Ti/SiO2/Si substrates via a 2-methoxyethanol based sol-gel process. The pure perovskite phase was obtained after 600 degrees C, 30 min annealing. The optimized annealing condition was at 650 degrees C for 4 h, and the derived relative permittivity and dissipation factor were 1650 and 0.05, Freestanding piezoelectric PNNZT microcantilevers were sculpted from a Au/Cr/PNNZT/Pt/Ti/SiO2/Si wafer by a microfabrication process. Then these PNNZT microcantilevers were used as the force sensors for a scanning force microscope (SFM). Force sensors were cantilever shapes with dimensions like 125-200(1) x 50(w) x 3.7(t) mu m(3). An image of an evaporated Sold film surface was obtained by SFM using the PNNZT force sensor, The PNNZT films have been proved to be an alternative sensing material for the force sensors of SFMs.