화학공학소재연구정보센터
Thin Solid Films, Vol.305, No.1-2, 304-308, 1997
Growth-Conditions of C-Axis Normal Y(1)Ba(2)Cu(3)O7-Delta Films on 20-Degrees Tilted Crystalline Substrates
Growth conditions of Y1Ba2Cu3O7-delta (YBCO) films on substrates whose crystalline axes were tilted by 20 degrees with respect to their surfaces were investigated. Yttria-stabilized zirconia (YSZ) and CeO2 were deposited for buffer layers. The important parameters for c-axis normal and in-plane axes aligned growth of YBCO overlayer were the thickness of the buffer layer and deposition temperature. High quality YBCO film was obtained with the optimized values of these parameters.